Key Advantages
Excellent 3D inspection performance dedicated to wafer-level packaging applications
Full 3D height and warpage inspection for Highly Reflective Die (mirror surface)
Enhanced measurement and inspection performance through proprietary Artificial Intelligence (AI) & vision technology
Support for Equipment Front End Module (EFEM)
Support for frame wafer handling (equipped with multiple load ports and dual robots)
Support for stable (multi-hole) vacuum chucks